NS-EN ISO 14644-2:2015
洁净室和相关受控环境 第2部分：通过颗粒浓度进行监测 以提供与空气洁净度相关的洁净室性能证据（ISO 14644-2:2015）
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)