This Publicly Available Specification (PAS) lists terms and
definitions used in or associated with the naming or describing of
applications of nanotechnologies to the fabrication of components,
devices, structures or systems with nanoscale dimensions, known
throughout this document as nanofabrication.
The terms relate specifically to the production of structures and device
elements that are typically less than 100 nm in more than 1-dimension.
It is applicable to, though is not limited to, fabrication tools and
techniques for electrical, electronic, magnetic, mechanical, optical
components, devices, structures and systems, and for the fabrication of
larger structures, components, devices and systems from nanoscale
elements.
NOTE The term nanolithography is used by some as a synonym for
nanofabrication. In this document, nanolithography is regarded as one
part of the process of nanofabrication.
This PAS is intended for use by technologists, regulators,
non-government organizations (NGOs), consumer organizations,
members of the public and others with an interest in the application or
use of nanotechnologies in the subject area.
NOTE The fabrication of nanoparticles is covered in PAS 71:2005.