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Chemical Vapor Equipment

Chemical Vapor Equipment, Total:6 items.

In the international standard classification, Chemical Vapor Equipment involves: Electromechanical components for electronic and telecommunications equipment, Fibre optic communications.

Professional Standard - Electron, Chemical Vapor Equipment

• SJ/T 10311-1992 Generic specification of low Pressure Chemical vapor Deposition system
• SJ 20984-2008 General specification for chemical vapor deposition (CVD) equipment
• SJ/T 11829.1-2022 Plasma enhanced chemical vapor deposition (PECVD) equipment for crystalline silicon photovoltaic cells Part 1: Tubular PECVD equipment
• SJ/T 11829.2-2022 Plasma enhanced chemical vapor deposition (PECVD) equipment for crystalline silicon photovoltaic cells Part 2: Plate PECVD equipment

Group Standards of the People's Republic of China, Chemical Vapor Equipment

• T/ZJATA 0017-2023 Chemical vapor deposition (CVD) epitaxy equipment for preparing silicon carbide semiconductor materials
• T/QGCML 892-2023 Plasma Chemical Vapor Deposition Optical Fiber Preform Preparation Equipment

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